Micro-tensile device and test for micro-wire in MEMS

Micro components and structures used in MEMS play a functionalized role for the typical application. Micro-wire is often used in the kinds of MEMS area, such as micro-fabrication, micro-assembly, and micro-packaging. The mechanical property of micro-wire can greatly influence its final function. Because of the physical tiny diameter for micro-wire, it is quite difficult for testing the mechanics properties. A new developed micro-tensile device based on piezoelectric actuator was presented in this paper. Key elements for the micro-tensile was introduced and analyzed in terms of the function and stiffness. With the developed micro-tensile device, copper micro wire with a micro notch was tested concerning the validation of the device. The morphologies for the tensile copper wire specimen were also analyzed by the imaging sub-system and scanning electron microscope (SEM). It is shown that the plastic deformation and micro-crack contribute to the break of copper micro-wire. The tensile test validated the implementation of micro-tensile device.