Title :
Force-calibrated AFM with rhombus-shaped cantilever for bending test of micro/nanoscale thin films
Author :
Baek, Chana-Wook ; Kim, Jong-Man ; Kim, Yong-Kweon ; Lee, Hak-Joo ; Kim, Jae-Hyun ; Cho, Kiho
Author_Institution :
Sch. of Electr. & Electron. Eng., Chung-Ang Univ., Seoul, South Korea
Abstract :
In this paper, force-calibrated AFM device with a novel rhombus-shaped AFM cantilever has been demonstrated for bending test of micro/nanoscale thin films. The rhombus-shaped AFM cantilever is designed to be symmetric around the loading axis, and thus robust to the lateral movement that a conventional beam-shaped AFM cantilever may have. This new cantilever structure has been fabricated and assembled with the AFM to measure the mechanical properties of gold strip specimens. With appropriate calibration procedures, this system can improve the measurement accuracy of the strip bending test.
Keywords :
atomic force microscopy; calibration; mechanical properties; mechanical testing; micromechanical devices; nanotechnology; thin films; bending test; force calibrated AFM; microscale thin films; nanoscale thin films; rhombus shaped cantilever; Assembly; Gold; Mechanical factors; Mechanical variables measurement; Nanoscale devices; Robustness; Strips; Testing; Thin film devices; Transistors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497500
