Title :
Calibration Of Microfabricated Shear Stress Sensors
Author :
Pan, Tao ; Hyman, Daniel ; Mehregany, Mehran ; Reshotko, Eli ; Willis, Brian
Keywords :
Calibration; Capacitance; Electrodes; Fingers; Force sensors; Mechanical sensors; Resonance; Silicon; Suspensions; Thermal stresses;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721842
