DocumentCode

1803382

Title

Calibration Of Microfabricated Shear Stress Sensors

Author

Pan, Tao ; Hyman, Daniel ; Mehregany, Mehran ; Reshotko, Eli ; Willis, Brian

Volume

2

fYear

1995

fDate

25-29 Jun 1995

Firstpage

443

Lastpage

446

Keywords

Calibration; Capacitance; Electrodes; Fingers; Force sensors; Mechanical sensors; Resonance; Silicon; Suspensions; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721842

Filename

721842