Title :
High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip
Author :
Pang, Wei ; Zhang, Hao ; Kim, Jong Jin ; Yu, Hongyu ; Kim, Eun Sok
Author_Institution :
Dept. of Electr. Eng., Southern California Univ., Los Angeles, CA, USA
Abstract :
This paper describes a novel high-tone bulk acoustic resonator (HBAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a loaded quality factor (Qloaded) of 3,580 at 2.5 GHz with a total size (including the contact pads) of 0.8×0.4×0.4mm3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.
Keywords :
Q-factor; acoustic resonator filters; micromachining; micromechanical resonators; microwave oscillators; voltage-controlled oscillators; 2.5 GHz; FBAR; HBAR; Pierce oscillator; film bulk acoustic resonator filter; high tone bulk acoustic resonator; loaded quality factor; microwave oscillators; surface micromachined filter; voltage controlled oscillator; Acoustic waves; Film bulk acoustic resonators; Frequency; Microwave oscillators; Piezoelectric films; Q factor; Resonator filters; Substrates; Surface acoustic waves; Voltage-controlled oscillators;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497507
