Wide tuning range MEMS band-pass filter with inductance change

Author

Yu, A.B. ; Liu, A.Q. ; Zhang, Q.X.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Jurong, Singapore

Volume

2

fYear

2005

fDate

5-9 June 2005

Firstpage

2061

Abstract

This paper describes a tunable band-pass filter (BPF) operating in the frequency range of 8-12 GHz. The filter consists of three resonators and four series coupling metal-insulator-metal (MIM) capacitors. The tuning approach is to change the inductance values of each resonator while all the capacitance values are kept as constant. The inductance change is achieved by changing the length of the shorted-stub using metal-metal contact switch. Results show that the center frequency of the tunable BPF can be shifted from 8 GHz to 12.3 GHz with 50 % tuning range. The 3 dB bandwidth can be kept around 10 % in the whole tuning range. The insertion loss is varied between 9 dB and 11 dB.

Keywords

MIM devices; band-pass filters; inductance; micromechanical resonators; microwave filters; tuning; 8 to 12.3 GHz; 9 to 11 dB; MEMS; RF switch; band pass filter; inductance; metal-insulator-metal capacitor; metal-metal contact switch; resonator filter; shorted stub; tunable filter; tunable resonator; Band pass filters; Capacitance; Frequency; Inductance; MIM capacitors; Metal-insulator structures; Micromechanical devices; Resonator filters; Switches; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497508

Filename

1497508