Title :
Sensitivity improvement of diaphragm type ultrasonic sensors by complementary piezoelectric polarization
Author :
Yamashita, Kaoru ; Okuyama, Masanori
Author_Institution :
Graduate Sch. of Eng. Sci., Osaka Univ., Toyonaka, Japan
Abstract :
A simple electrode configuration of piezoelectric ultrasonic sensor has been proposed and the sensitivity has been improved. The new electrode configuration enables to use two parts of both the positive and negative piezoelectric polarizations and to improve the sensitivity compared to conventional sensors by summing up both the absolute outputs. Optimal electrode sizes have been found by theoretical calculation and the sensor with the optimal configuration has been fabricated. The sensitivity of the new sensor has been improved 50% compared with that of conventional sensors.
Keywords :
diaphragms; microsensors; piezoelectric devices; polarisation; ultrasonic transducers; complementary piezoelectric polarization; diaphragm type ultrasonic sensors; electrode configuration; optimal electrode sizes; piezoelectric sensor; sensitivity improvement; strain distribution; Capacitive sensors; Electrodes; Image sensors; Microsensors; Piezoelectric polarization; Resonance; Tensile strain; Ultrasonic imaging; Ultrasonic variables measurement; Velocity measurement;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497521
