Low noise, low power micromechanical oscillator

Author

Rantakari, Pekka ; Kaajakari, Ville ; Mattila, Tomi ; Kiihamaki, Jyrki ; Oja, Aarne ; Tittonen, Ilkka ; Seppa, Heikki

Author_Institution

Micronova & Center for New Mater., Helsinki Univ. of Technol., Finland

Volume

2

fYear

2005

fDate

5-9 June 2005

Firstpage

2135

Abstract

A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated electronics are used to implement a 13-MHz oscillator that has noise floor of -147 dBc/Hz and power consumption of 240 μW including both the loop amplifier and the buffer to a 10-pF load. The design of Pierce type MEMS oscillator is discussed in terms of noise, power, and oscillator stability.

Keywords

application specific integrated circuits; circuit stability; integrated circuit design; low-power electronics; micromechanical resonators; radiofrequency integrated circuits; radiofrequency oscillators; 10 pF; 13 MHz; 180 nm; 20 V; 240 muW; Pierce type MEMS oscillator; application specific integrated circuits; full custom integrated electronics; integrated circuit design; low noise micromechanical oscillator; low power micromechanical oscillator; low-power electronics; micromechanical resonators; radiofrequency integrated circuits; radiofrequency oscillators; Electrical resistance measurement; Electrodes; Energy consumption; Impedance; Microcavities; Micromechanical devices; Oscillators; Phase noise; Silicon; Stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497526

Filename

1497526