A method using the base plate jerk feedback to control the positioning of a pneumatic stage — Control of the stage vibration caused by the reaction force

Author

Wali, Mohebullah ; Nakamura, Yukinori ; Wakui, Shinji

Author_Institution

Dept. of Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan

fYear

2011

fDate

15-18 May 2011

Firstpage

629

Lastpage

634

Abstract

In this paper, a pneumatic positioning stage is considered. The stage is moved by the driving force and the reaction force leads the base plate to vibrate, resulting in the fluctuation of the stage in the opposite direction. In order to reduce the effect of the reaction force and improve the positioning time, the base plate jerk feedback is proposed. This feedback is firstly realized using an external force exerted to the base plate and then applied for the real condition of positioning. The experimental results show the effectiveness of the proposed method.

Keywords

feedback; pneumatic actuators; position control; vibration control; base plate jerk feedback; driving force; pneumatic positioning stage; positioning time; reaction force; stage vibration control; Acceleration; Actuators; Force; Mechanical systems; Servomotors; Springs; Vibrations; PDD² compensator; base plate; coil-type spring isolator; jerk feedback; perfect integrator; pneumatic stage; positioning;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Conference (ASCC), 2011 8th Asian

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-487-9

Electronic_ISBN

978-89-956056-4-6

Type

conf

Filename

5899145