DocumentCode
1805330
Title
Polysiloxane based optical waveguide equipped with fiber guides by using direct photolithography technique
Author
Maeda, Yukio ; Takase, Hideaki ; Tamaki, Kentarou ; Huang, Fujun ; Eriyama, Yuichi
Author_Institution
Tsukuba Res. Lab., JSR Corp., Ibaraki, Japan
Volume
1
fYear
2005
fDate
6-11 March 2005
Abstract
Fabrication of polysiloxane based optical waveguide with fiber guides by using a direct photolithography technique was developed. The precise patterned fiber guides allowed performing a simple and cost saving alignment without use of fiber arrays.
Keywords
optical communication equipment; optical fibre fabrication; optical polymers; optical waveguides; photolithography; direct photolithography technique; fiber guide; optical waveguide; polysiloxane fabrication; Coatings; Lithography; Optical arrays; Optical device fabrication; Optical fibers; Optical materials; Optical refraction; Optical variables control; Optical waveguides; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference, 2005. Technical Digest. OFC/NFOEC
Print_ISBN
1-55752-783-0
Type
conf
DOI
10.1109/OFC.2005.192524
Filename
1497604
Link To Document