A novel high-frequency current output inverter based on an immittance conversion element and a hybrid MOSFET-SiC diode switch

The field of corona and plasma discharge application typically uses high-frequency and high-voltage power generators having an output frequency of 1-10 MHz. Traditionally, analog high-frequency amplifiers are used even though conversion efficiency is limited to 50%. In the present paper, a novel high-efficiency high-frequency inverter circuit topology utilizing an immittance-conversion element and a hybrid MOSFET-SiC diode switch is presented. Due to the immittance-conversion element, the inverter generates a stable high-frequency current regardless of the output impedance of the load circuit and enables the output voltage to be very high, even if the DC-bus voltage of the inverter is very low. The hybrid MOSFET-SiC diode switch, which is composed of conventional Silicon MOSFET and the SiC diode, helps high-frequency switching without high-frequency ringing. A 50-W, 1-MHz current output inverter is fabricated, and its operation performance is verified through simulation and experiments.