• DocumentCode
    1806205
  • Title

    A patterning technique for superconducting MgB2 films

  • Author

    Yang, Fashun ; Zhou, Zhangyu ; Ding, Zhao ; Fu, Xinghua

  • Author_Institution
    Dept. of Electron., Guizhou Univ., Guiyang
  • Volume
    2
  • fYear
    2008
  • fDate
    21-24 April 2008
  • Firstpage
    595
  • Lastpage
    596
  • Abstract
    The precursor boron films were prepared by chemical vapor deposition by using diborane as the boron source, and patterned by using H2O2 solution as the etchant. The films then annealed in Mg vapor in a tantalum crucible. The patterned MgB2 films with high resolution has a transition temperature of 37 K and a critical current density of 1times106 A/cm2.
  • Keywords
    boron; magnesium compounds; superconducting thin films; MgB2; boron source; chemical vapor deposition; diborane; patterning technique; precursor boron films; superconducting MgB2 films; tantalum crucible; Aluminum oxide; Annealing; Argon; Boron; Chemical vapor deposition; Magnesium compounds; Strips; Substrates; Superconducting films; Superconducting transition temperature; CVD; Magnesium diboride; lithography; patterning; superconducting films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Millimeter Wave Technology, 2008. ICMMT 2008. International Conference on
  • Conference_Location
    Nanjing
  • Print_ISBN
    978-1-4244-1879-4
  • Electronic_ISBN
    978-1-4244-1880-0
  • Type

    conf

  • DOI
    10.1109/ICMMT.2008.4540463
  • Filename
    4540463
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1806205