DocumentCode :
1806546
Title :
Determining of Young’s modulus of multi-layered structure by SAWs method
Author :
Xiao, Xia ; You, Xue-Yi
Author_Institution :
Sch. of Electron. & Inf. Eng., Tianjin Univ., Tianjin
Volume :
2
fYear :
2008
fDate :
21-24 April 2008
Firstpage :
641
Lastpage :
644
Abstract :
The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure are derived in this study. The dispersion features of SAWs propagating on the example TiO2/TiN duplex film coated on titanium alloy are investigated to instruct an accurate and facile fitting process for determining Young´s modulus of TiO2/TiN duplex film. The dependence of dispersion relation on the elastic modulus of TiO2 and TiN as well as frequency are provided and discussed in detail. The study shows an obvious influence of multi-layered structure on the dispersion relation of SAWs. Numerical result shows that the dispersion curve is well separated. It confirms that the SAWs technique has high resolution on determining Young´s modulus of multi- layered structure.
Keywords :
Young´s modulus; dispersion (wave); multilayers; surface acoustic waves; thin films; titanium compounds; TiO-TiN; Young´s modulus; dispersion features; duplex film; elastic modulus; facile fitting process; mechanical property; multilayered structure; surface acoustic waves technique; thin film; titanium alloy; Acoustic propagation; Acoustic waves; Dispersion; Equations; Mechanical factors; Sawing machines; Surface acoustic waves; Tin; Titanium alloys; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave and Millimeter Wave Technology, 2008. ICMMT 2008. International Conference on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-1879-4
Electronic_ISBN :
978-1-4244-1880-0
Type :
conf
DOI :
10.1109/ICMMT.2008.4540476
Filename :
4540476
Link To Document :
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