Title :
Imaging Ellipsometry For Biosensor Applications
Author :
Jin, Gang ; Jansson, Roger ; Lundström, Ingemar ; Arwin, Hans
Keywords :
Biosensors; Charge coupled devices; Ellipsometry; Lenses; Optical films; Optical reflection; Polarization; Silicon; Substrates; Thickness measurement;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721860
