DocumentCode

1808182

Title

Imaging Ellipsometry For Biosensor Applications

Author

Jin, Gang ; Jansson, Roger ; Lundström, Ingemar ; Arwin, Hans

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

509

Lastpage

512

Keywords

Biosensors; Charge coupled devices; Ellipsometry; Lenses; Optical films; Optical reflection; Polarization; Silicon; Substrates; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721860

Filename

721860