• DocumentCode
    1808287
  • Title

    Bulk acoustic sensor of 2-nitro-5,10,15,20-tetraphenyl-21H,23H-porphinecopper(III) thin film to detect organic vapours

  • Author

    Mohamed, Ruziana ; Salleh, Muhamad Mat ; Yahaya, Muhammad

  • Author_Institution
    Sch. of Appl. Phys., Univ. Kebangsaan Malaysia, Selangor, Malaysia
  • fYear
    2002
  • fDate
    19-21 Dec. 2002
  • Firstpage
    462
  • Lastpage
    464
  • Abstract
    A bulk acoustic sensor system was fabricated to detect organic vapours of toluene, benzene, hexane and cyclohexane. The system consists of Langmuir Blodgett thin film deposited on a quartz crystal. The sensing sensitivity was based on the changes of the fundamental frequency of the quartz crystal upon exposure toward vapours. It was found that the thin film was sensitive to the present of gases by reducing the crystal frequency as high as 13 Hz, 8 Hz, 4 Hz, and 3 Hz for toluene, benzene, hexane and cyclohexane respectively. The response time to reach the maximum changes on the frequency was within 200 seconds. The recovery time after the vapors removed from the system was within 200 seconds. The variation of response with the type of vapours may be used as selectivity criteria for the sensor.
  • Keywords
    Langmuir-Blodgett films; chemical sensors; copper compounds; organic compounds; vapour deposition; 13 Hz; 2-nitro-5,10,15,20-tetraphenyl-21H,23H-porphinecopper(III); 200 sec; 3 Hz; 4 Hz; 8 Hz; Langmuir Blodgett thin film; SiO2; acoustic sensor system; benzene; cyclohexane; hexane; organic vapours; quartz crystal; toluene; Acoustic sensors; Acoustic signal detection; Chemical sensors; Crystalline materials; Frequency; Gases; Sputtering; Substrates; Thin film sensors; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Electronics, 2002. Proceedings. ICSE 2002. IEEE International Conference on
  • Print_ISBN
    0-7803-7578-5
  • Type

    conf

  • DOI
    10.1109/SMELEC.2002.1217866
  • Filename
    1217866