Title :
Design of weighting filters with dynamic uncertainty for ultra precision positioning stage
Author :
Luo, Xin ; Bao, Xiu-lan ; Chen, Xue-dong ; Zeng, Li-zhan ; Pu, Hua-yan ; Ye, Yi-xi ; Zhu, Jin-cheng
Author_Institution :
State Key Lab. of Digital Manuf. Equip. & Technol., Huazhong Univ. of Sci. & Technol., Wuhan, China
Abstract :
In this paper, weighting filters are designed to characterize the performance demands and uncertainty specifications of an ultra precision positioning stage in IC manufacturing. To deal with dynamical uncertainty, the motion principles and structural properties of ultra-precision stage are discussed, and then dynamical parameters of the positioning stage are identified. A feedback controller is synthesis by using the weighting filters in H¿ mathematical framework. Simulation results are presented to show the applicability of the proposed weighting filters.
Keywords :
controllers; filters; integrated circuit design; integrated circuit manufacture; position control; precision engineering; weighing; H¿ mathematical framework; IC manufacturing; dynamic uncertainty; dynamical parameters; feedback controller; motion principles; structural property; ultraprecision positioning stage; weighting filters; Adaptive control; Digital filters; Electrical equipment industry; Electronic mail; Feeds; Laboratories; Optimal control; Pulp manufacturing; Robust control; Uncertainty; Weighting filter; dynamic identification; nanometer; robust control; ultra precision;
Conference_Titel :
Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) and 2009 China Symposium on Frequency Control Technology, Joint Conference of the 2009 Symposium on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-4950-7
DOI :
10.1109/SPAWDA.2009.5428904
