Preparation and characterization of Al-doped ZnO piezoelectric thin films

Summary form only given. In this paper, the Al-doped Zinc Oxide (ZAO) thin films have been successfully spin coated on glass substrate by using the sol-gel method. The X-ray diffraction (XRD) analysis is used to characterize their orientation and crystalline quality, and SEM is used to study the morphologies of ZAO thin films. The influence of different heat treatment temperatures on the crystalline quality and the surface morphology are also investigated. Moreover, the effect of annealing temperatures to the transmission spectrum of the thin films is studied by using the UV - visible spectrophotometer. The results show that the crystal orientation of ZAO thin films with heat treatment at 100°C and annealing treatment at 600°C are the appropriate parameters for using the sol-gel method to prepare ZAO thin film. The ZAO thin films with a glass slide substrate prepared by our developed method can be applied as transparent electrode.