Title :
A Double Sided Capacitive Miniaturised Accelerometer Based On Photovoltaic Etch Stop Technique
Author :
Lapadatu, Daniel ; De Cooman, Michel ; Puers, Robert
Keywords :
Accelerometers; Boron; Capacitors; Etching; Parasitic capacitance; Passivation; Photovoltaic cells; Photovoltaic systems; Solar power generation; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721889
