DocumentCode

1810849

Title

A Double Sided Capacitive Miniaturised Accelerometer Based On Photovoltaic Etch Stop Technique

Author

Lapadatu, Daniel ; De Cooman, Michel ; Puers, Robert

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

546

Lastpage

549

Keywords

Accelerometers; Boron; Capacitors; Etching; Parasitic capacitance; Passivation; Photovoltaic cells; Photovoltaic systems; Solar power generation; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721889

Filename

721889