DocumentCode :
1810873
Title :
A Capacitive Accelerometer Using Sdb-soi Structure
Author :
Matsumoto, Yoshinori ; Iwakdri, M. ; Tanaka, Hidekazu ; Ishida, Makoto ; Nakamura, Tetsuro
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
550
Lastpage :
553
Keywords :
Accelerometers; Bonding; Capacitance; Capacitive sensors; Fabrication; Micromachining; Sensor phenomena and characterization; Shape; Silicon on insulator technology; Solid state circuits;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721890
Filename :
721890
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1810873
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