Three-axis Capacitive Accelerometer With Uniform Axial Sensitivities

Author

Mineta, T. ; Kobayashi, S. ; Watanabe, Y. ; Kanauchi, S. ; Nakagawa, I. ; Suganurna, E. ; Esashi, M.

Volume

fYear

1995

fDate

25-29 June 1995

Firstpage

554

Lastpage

557

Keywords

Acceleration; Accelerometers; Capacitance; Electrodes; Glass; Gravity; Micromachining; Particle beams; Silicon; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.721891

Filename

721891

Link To Document