DocumentCode :
1810925
Title :
A Novel 3-axis Monolithic Silicon Accelerometer
Author :
Andersson, Gert I.
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
558
Lastpage :
561
Keywords :
Acceleration; Accelerometers; Actuators; Automotive engineering; Manufacturing industries; Manufacturing processes; Prototypes; Silicon; Solid state circuits; Structural beams;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721892
Filename :
721892
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1810925
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