Title :
Tri-axial Piezoelectric Accelerometer
Keywords :
Acceleration; Accelerometers; Capacitance; Control systems; Electrostatics; Glass; Micromachining; Piezoresistance; Space technology; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721894
