DocumentCode :
1810976
Title :
Compensation Method Of Offset And Its Temperature Drift In Silicon Piezoresistive Pressure Sensor Using Double Wheatstone-bridge Configuration
Author :
Lee, Young-Tae ; Seo, Hee-Don ; Kawamura, Akihisa ; Yamada, Tetsuhiro ; Matsumoto, Yoshinori ; Ishida, Makoto ; Nakamura, Tetsuro
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
570
Lastpage :
573
Keywords :
Biosensors; Bridge circuits; Piezoresistance; Piezoresistive devices; Residual stresses; Resistors; Sensor phenomena and characterization; Silicon; Temperature sensors; Thermal stresses;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721895
Filename :
721895
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1810976
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