DocumentCode
1810976
Title
Compensation Method Of Offset And Its Temperature Drift In Silicon Piezoresistive Pressure Sensor Using Double Wheatstone-bridge Configuration
Author
Lee, Young-Tae ; Seo, Hee-Don ; Kawamura, Akihisa ; Yamada, Tetsuhiro ; Matsumoto, Yoshinori ; Ishida, Makoto ; Nakamura, Tetsuro
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
570
Lastpage
573
Keywords
Biosensors; Bridge circuits; Piezoresistance; Piezoresistive devices; Residual stresses; Resistors; Sensor phenomena and characterization; Silicon; Temperature sensors; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721895
Filename
721895
Link To Document