DocumentCode :
1811009
Title :
A Pressure Sensor Based On A Nitride Membrane Using Single Crystalline Piezoresistors
Author :
Folkmer, Bernd ; Steiner, Peter ; Lang, Walter
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
574
Lastpage :
577
Keywords :
Biomembranes; Crystallization; Etching; Fabrication; Mechanical sensors; Piezoresistive devices; Sensor phenomena and characterization; Silicon; Thermal sensors; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721896
Filename :
721896
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1811009
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