Title :
Differential Pressure Sensor With Micromachined Overrange Protectors
Author :
Watanabe, Tetsuya ; Fukuhara, Satoshi ; Tsukamoto, Hideo ; Kudo, Takahiro ; Ikeda, Kyoichi
Keywords :
Bonding; Electrodes; Glass; Hermetic seals; Mechanical sensors; Micromachining; Piezoresistance; Protection; Semiconductor device measurement; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721897
