Title :
Integrated Mach-zehnder Interferometer Pressure Transducer
Author :
Hoppe, E. ; Andersen, L.U.A. ; Bouwstra, S.
Keywords :
Biomembranes; Capacitive sensors; Electromagnetic waveguides; Etching; Optical device fabrication; Optical interferometry; Optical sensors; Optical waveguides; Shape; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721900
