DocumentCode
1811124
Title
A high pressure resonant sensor
Author
Greenwood, J.C.
Author_Institution
Druck Ltd., Leicester, UK
fYear
1994
fDate
34346
Firstpage
42552
Lastpage
42554
Abstract
The author developed a silicon resonant sensor for measuring pressures up to 7000 psi. The micromachined resonator is bonded to a thick silicon diaphragm and is excited electrostatically. The resolution is better than 100 ppm
Keywords
pressure sensors; semiconductor devices; Si; electrostatic excitation; high pressure resonant sensor; micromachined resonator; pressure measurement; silicon diaphragm;
fLanguage
English
Publisher
iet
Conference_Titel
Heading Sensors for Sonar and Marine Applications, IEE Colloquium on
Conference_Location
London
Type
conf
Filename
284694
Link To Document