Title :
Resonant Sensors On Thin Semi-insulating GaAs Membranes
Author :
Miao, J. ; Mort, K. ; Hartnagel, H.L. ; Schweitz, J. Å ; Rück, D. ; Tinschert, K.
Keywords :
Annealing; Biomembranes; Electrodes; Gallium arsenide; Insulation; Micromechanical devices; Resonance; Silicon; Vibrations; Wet etching;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721904
