DocumentCode

1811197

Title

Resonant Sensors On Thin Semi-insulating GaAs Membranes

Author

Miao, J. ; Mort, K. ; Hartnagel, H.L. ; Schweitz, J. Å ; Rück, D. ; Tinschert, K.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

604

Lastpage

607

Keywords

Annealing; Biomembranes; Electrodes; Gallium arsenide; Insulation; Micromechanical devices; Resonance; Silicon; Vibrations; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721904

Filename

721904