Title :
Design And Performance Characteristics Of An Integrated High Capacity Detf-based Force Sensor
Author :
Cheshmehdoost, A. ; Jones, B.E.
Keywords :
Counting circuits; Force measurement; Force sensors; Instruments; Manufacturing; Mechanical sensors; Metrology; Resonant frequency; Sensor phenomena and characterization; Vibrations;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721905
