Title :
Analysis And Design Concept Of Highly Sensitive Silicon Gyroscope
Author :
Maenaka, Kazusuke ; Konishi, Yasushi ; Fujita, Takayuki ; Maeda, Muneo
Keywords :
Circuit stability; Gyroscopes; Mechanical sensors; Open loop systems; Resonance; Resonant frequency; Silicon; Structural beams; Transient response; Vibration measurement;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721906
