DocumentCode
1811297
Title
Fabrication Of Ultrasonic Sensor Using Silicon Membrane
Author
Inoue, Kohji ; Suzuki, Yoshihiko ; Ogawa, Souichi
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
616
Lastpage
619
Keywords
Anisotropic magnetoresistance; Biomembranes; Etching; Fabrication; Glass; Mechanical sensors; Sensor phenomena and characterization; Silicon; Textile industry; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721907
Filename
721907
Link To Document