DocumentCode

1811315

Title

Optimization Of Micromachined Ultrasound Transducer By Finite Element Simulation

Author

Hornung, M. ; Brand, O. ; Baltes, H.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

620

Lastpage

623

Keywords

Biomembranes; Etching; Fabrication; Finite element methods; Resonance; Resonant frequency; Silicon; Textile industry; Ultrasonic imaging; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721908

Filename

721908