Analysis of surface acoustic wave resonators with boundary element method

Author

Ke, Ya-bing ; Li, Hong-lang ; He, Shi-tang

Author_Institution

Inst. of Acoust., Chinese Acad. of Sci., Beijing, China

fYear

2009

fDate

17-20 Dec. 2009

Firstpage

42

Lastpage

42

Abstract

The paper introduces a rigorous numerical model to analyze SAW (surface acoustic wave) resonators by BEM (boundary element method). At first it is proposed that the mass-loading effect of electrode is neglected and the surface of substrate is free, and the substrate is semi-infinite. Then corresponding programs are developed to analyze a SAW resonator. Electrical charge distribution on the electrode-substrate interface is expanded with Chebyshev polynomials in order to accelerate programs. Numerical results indicate that its admittance has good agreement with the result by FEM (finite element method) software ANSYS. Therefore BEM is a practical method to analyze SAW devices, which furthermore supports arbitrary electrode geometries and takes account of the effect of bulk wave.

Keywords

Chebyshev approximation; boundary-elements methods; electrodes; finite element analysis; substrates; surface acoustic wave resonators; ANSYS; Chebyshev polynomials; SAW devices; SAW resonator; arbitrary electrode geometry; boundary element method; electrical charge distribution; electrode-substrate interface; finite element method; mass loading effect; surface acoustic wave resonators; Acceleration; Acoustic waves; Admittance; Boundary element methods; Chebyshev approximation; Electrodes; Finite element methods; Numerical models; Polynomials; Surface acoustic waves; BEM (boundary element method); Resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) and 2009 China Symposium on Frequency Control Technology, Joint Conference of the 2009 Symposium on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-4950-7

Type

conf

DOI

10.1109/SPAWDA.2009.5428960

Filename

5428960