Silicon IC Process Compatible Bolometer Infrared Focal Plane Array

Author

Tanaka, A. ; Matsumoto, S. ; Tsukamoto, N. ; Roh, Samuel ; Endoh, T. ; Nakazato, A. ; Kumazawa, Y. ; Hijikawa, M. ; Gotoh, H. ; Tanaka, T. ; Teranish, N.

Volume

fYear

1995

fDate

25-29 June 1995

Firstpage

632

Lastpage

635

Keywords

Bolometers; Circuits; Conducting materials; Fabrication; Image sensors; Infrared detectors; Sensor arrays; Silicon; Thermal conductivity; Titanium;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.721911

Filename

721911

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