DocumentCode :
1811385
Title :
Silicon IC Process Compatible Bolometer Infrared Focal Plane Array
Author :
Tanaka, A. ; Matsumoto, S. ; Tsukamoto, N. ; Roh, Samuel ; Endoh, T. ; Nakazato, A. ; Kumazawa, Y. ; Hijikawa, M. ; Gotoh, H. ; Tanaka, T. ; Teranish, N.
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
632
Lastpage :
635
Keywords :
Bolometers; Circuits; Conducting materials; Fabrication; Image sensors; Infrared detectors; Sensor arrays; Silicon; Thermal conductivity; Titanium;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721911
Filename :
721911
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1811385
