DocumentCode

1811424

Title

A Bulk-micromachined 1024-element Uncooled Infrared Imager

Author

Oliver, Andrew D. ; Baer, Wayne G. ; Wise, Kensall D.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

636

Lastpage

639

Keywords

Circuits; Infrared detectors; Infrared heating; Infrared imaging; Packaging; Photonic band gap; Pixel; Process control; Silicon; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721912

Filename

721912