Title :
Optimized Structured Absorbers For CMOS Infrared Detectors
Author :
Schneeberger, N. ; Paul, O. ; Baltes, H.
Keywords :
Atmospheric measurements; CMOS process; Infrared detectors; Infrared sensors; Passivation; Sensor phenomena and characterization; Temperature sensors; Testing; Thermal sensors; Thermoelectricity;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721915