Title :
Ring resonator adopting multimode waveguide turning mirrors
Author :
Chiu, C.L. ; Lay, T.S. ; Chang, T.Y.
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung
Abstract :
The characteristic response of In0.532Ga0.468As/In0.528Ga0.257Al0.215As on InP single ring resonators in the form of race tracks with a radius of 260(150), 110(600) and 260(150) mum are presented. The used 2times2 multimode interference (MMI) couplers with coupling factor 0.85 are as short as 128 mum. Deep etching vertical mirror was used in the middle of MMI crossing. The free spectral ranges of 83 GHz and the through output (max)-drop (min) ratio of 21 dB have been achieved for the single ring resonator.
Keywords :
III-V semiconductors; aluminium compounds; etching; gallium arsenide; indium compounds; integrated optics; micro-optomechanical devices; micromechanical resonators; micromirrors; optical couplers; optical resonators; optical waveguides; 2times2 multimode interference couplers; In0.532Ga0.468As-In0.528Ga0.257Al0.215As; deep etching vertical mirror; free spectral ranges; frequency 83 Hz; multimode waveguide turning mirrors; race tracks; single ring resonators; throughtput-drop ratio; Etching; Fabrication; Indium phosphide; Mirrors; Optical filters; Optical resonators; Optical ring resonators; Optical waveguides; Resonator filters; Turning; Optical resonators; Semiconductor; Wavelength filtering devices;
Conference_Titel :
Indium Phosphide and Related Materials, 2008. IPRM 2008. 20th International Conference on
Conference_Location :
Versailles
Print_ISBN :
978-1-4244-2258-6
Electronic_ISBN :
1092-8669
DOI :
10.1109/ICIPRM.2008.4702905
