DocumentCode
1811508
Title
Optical Properties Of The Integrated Infrared Sensor
Author
Rossberg, Dirk
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
652
Lastpage
655
Keywords
Chemical sensors; Electromagnetic wave absorption; Gases; Infrared sensors; Infrared spectra; Integrated optics; Micromachining; Optical sensors; Silicon; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721916
Filename
721916
Link To Document