Title :
Optical Properties Of The Integrated Infrared Sensor
Keywords :
Chemical sensors; Electromagnetic wave absorption; Gases; Infrared sensors; Infrared spectra; Integrated optics; Micromachining; Optical sensors; Silicon; Spectroscopy;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721916