Title :
An Inertial-Grade, Micromachined Vibrating Beam Accelerometer
Author :
Roszhart, Terry V. ; Jerman, Hal ; Drake, Jeo ; de Cotiis, C.
Keywords :
Acceleration; Accelerometers; Anisotropic magnetoresistance; Assembly; Etching; Fasteners; Frequency; Glass; Silicon; Testing;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721917
