DocumentCode
1811676
Title
Three Dimensional Vector Accelerometer Using Soi Structure For High Temperature
Author
Takao, Hidekuni ; Matsumoto, Yoshinori ; Seo, Hee-Don ; Tanaka, Hidekazu ; Ishida, Makaoto ; Nakamura, Tetsuro
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
683
Lastpage
686
Keywords
Acceleration; Accelerometers; Circuits; Leakage current; Piezoresistance; Piezoresistive devices; Silicon; Temperature distribution; Temperature sensors; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721924
Filename
721924
Link To Document