DocumentCode

1811721

Title

Acceleration Microswitches With Adjustable Snapping Threshold

Author

Go, Jeung Sang ; Cho, Young-Ho ; Kwak, Byung Man

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

691

Lastpage

694

Keywords

Acceleration; Biomembranes; Electrodes; Etching; Fabrication; Microswitches; Residual stresses; Silicon; Switches; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721926

Filename

721926