Title :
Miniature Condenser Microphone With A Thin Silicon Membrane Fabricated On Simox Substrate
Author :
Horwath, P. ; Erlebach, A. ; Köhler, R. ; Kück, H.
Keywords :
Biomembranes; Circuit testing; Equations; Frequency response; Microphones; Parasitic capacitance; Resonance; Silicon; Tensile stress; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721927
