Title :
Design Of A Silicon Microphone With Differential Read-out Of A Sealed Double Parallel-plate Capacitor
Author :
Bay, Jesper ; Hansen, Ole ; Bouwstra, Siebe
Keywords :
Analytical models; Capacitance; Capacitors; Hearing aids; Microelectronics; Microphones; Packaging; Silicon; Transducers; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721928
