DocumentCode

1811787

Title

Fabrication Of A Silicon Micromachined Capacitive Microphone Using A Dry-etch Process

Author

Ning, Y.B. ; Mitchell, A.W. ; Tait, R.N.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

704

Lastpage

707

Keywords

Aluminum; Biomembranes; Fabrication; Microphones; Silicon; Solid state circuits; Sputter etching; Tensile stress; Transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721929

Filename

721929