Title :
A Resonant Polyimide-based Humidity Sensor
Author :
Schroth, A. ; Sager, K. ; Gerlach, G. ; Häberli, A. ; Boltshauser, T. ; Baltes, H.
Keywords :
Biomembranes; Finite element methods; Frequency; Humidity measurement; Mechanical factors; Mechanical sensors; Moisture; Polyimides; Polymers; Resonance;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721938
