DocumentCode

1811977

Title

A Resonant Polyimide-based Humidity Sensor

Author

Schroth, A. ; Sager, K. ; Gerlach, G. ; Häberli, A. ; Boltshauser, T. ; Baltes, H.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

740

Lastpage

742

Keywords

Biomembranes; Finite element methods; Frequency; Humidity measurement; Mechanical factors; Mechanical sensors; Moisture; Polyimides; Polymers; Resonance;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721938

Filename

721938