Title :
Theory, Design And Operation Of A Conductivity Based Surface Acoustic Wave Ozone Sensor
Author :
Banda, Pedro A. ; Wlodarski, Wojciech ; Pisarkiewicz, Tadeusz
Keywords :
Acoustic sensors; Acoustic waves; Conductive films; Conductivity; Frequency; Gas detectors; Oscillators; Semiconductor films; Substrates; Surface acoustic waves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721942
