DocumentCode

1812075

Title

Theory, Design And Operation Of A Conductivity Based Surface Acoustic Wave Ozone Sensor

Author

Banda, Pedro A. ; Wlodarski, Wojciech ; Pisarkiewicz, Tadeusz

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

755

Lastpage

757

Keywords

Acoustic sensors; Acoustic waves; Conductive films; Conductivity; Frequency; Gas detectors; Oscillators; Semiconductor films; Substrates; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721942

Filename

721942