DocumentCode :
1813345
Title :
Reflection and dielectric characteristics of TbDyFe thin film for high frequency MEMS sensors and actuators
Author :
Zhiqiang, Yang ; Mengchao, Weng
Author_Institution :
Vocational & Tech. Coll., Zhejiang Normal Univ., Jinhua
Volume :
3
fYear :
2008
fDate :
21-24 April 2008
Firstpage :
1544
Lastpage :
1546
Abstract :
The femtosecond pump-probe experimental device was designed to investigate reflection and dielectric properties of TbDyFe thin films. Tb0.27Dy0.73Fe2 thin films were prepared by DC magnetron sputtering and the component, surface topography and crystalline property of TbDyFe thin films were measured by scanning electronic microscope (SEM) and atom force microscope (AFM). The extremum of reflectivity change corresponding to the electron thermalization was 100 plusmn 30 fs. Amplitude of extremum reaches its maximum at 160 mW pump fluence and it turns to zero at 0 mW and echo wave was found in reflectivity waveform. Combine with Fresnel reflect formula and K-K transformation, real and imaginary part of the complex dielectric constant was derived and it indicated that the absorption of thin film became greater with the increasing of reflection at surface after 0 ps delay time, but absorption of thin film recover to its initial state after 1 ps.
Keywords :
atomic force microscopy; dysprosium alloys; ferromagnetic materials; iron alloys; magnetic thin films; microactuators; microsensors; permittivity; scanning electron microscopy; sputtered coatings; surface topography; terbium alloys; time resolved spectra; DC magnetron sputtering; MEMS actuators; MEMS sensors; Tb0.27Dy0.73Fe2; atom force microscope; complex dielectric constant; crystalline property; dielectric characteristics; femtosecond pump-probe device; reflection characteristics; scanning electronic microscope; surface topography; thin film; Actuators; Atomic force microscopy; Dielectric thin films; Frequency; Micromechanical devices; Reflection; Scanning electron microscopy; Sensor phenomena and characterization; Sputtering; Thin film sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave and Millimeter Wave Technology, 2008. ICMMT 2008. International Conference on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-1879-4
Electronic_ISBN :
978-1-4244-1880-0
Type :
conf
DOI :
10.1109/ICMMT.2008.4540744
Filename :
4540744
Link To Document :
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