Micro-cantilever array and its application in gas sensor

Micro-cantilever array was made by micromachining technology. Its mechanical characteristic was analyzed. A gas sensor based micro-cantilever array was presented. The different material sensing layers were fabricated on the different micro-cantilever surface respectively; the physical or chemical absorption alters the mass of micro-cantilever, accordingly, the mechanical characteristic of micro-cantilever was changed. The vibration characteristics of beam array and its changes were measured by optoelectronic means. The component of mixed gas was identified by neural network and pattern recognition technologies. The micro-cantilever array gas sensor was examined by using ethanol (C₂H₅OH), natural gas and butane (C₄H₁₀). The experiment results of the gas sensor were obtained.