Title :
Development of deformable mirror for spherical aberration compensation
Author :
Aoki, Sunao ; Yamada, Masahiro ; Yamagami, Tamotsu
Author_Institution :
Home Syst. Dev. Div., Sony Corp., Tokyo
Abstract :
By using conventional MEMS processes, we have successfully developed a high accuracy and easily controllable deformable mirror with simple structure. Furthermore, we have obtained a reflective film of low stress which was a challenge.
Keywords :
aberrations; adaptive optics; micro-optomechanical devices; micromirrors; optical disc storage; optical films; MEMS processes; deformable mirror; high-density optical disc systems; reflective film; spherical aberration compensation; Micromechanical devices; Mirrors; Optical films; Optical surface waves; Reflectivity; Semiconductor films; Shape; Silicon; Stress; Testing;
Conference_Titel :
Optical Data Storage Topical Meeting, 2009. ODS '09.
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-3342-1
Electronic_ISBN :
978-1-4244-3343-8
DOI :
10.1109/ODS.2009.5031764
