Title :
GaAsSbN/GaAs long wavelength PIN detectors
Author :
Chen, Chi-Kuang ; Ma, Ta-Chun ; Lin, Yan-Ting ; Lin, Hao-Hsiung
Author_Institution :
Grad. Inst. of Electron. Eng., Nat. Taiwan Univ., Taipei
Abstract :
We report the fabrication of dilute nitride GaAsSbN/GaAs PIN detector with a cut-off wavelength over 1.5 mum. Effect of thermal annealing on the device characteristics is also presented. We found that the thermal treatment increases the acceptor concentration of the GaAsSbN epilayer. The increment leads to the change of conduction type in undoped and Si-doped GaAsSbN and results in low quantum efficiency for the homojunction p-i-n GaAsSbN detector. A heterojunction n-GaAs/i-GaAsSbN/p-GaAsSbN detector was designed to avoid the problem of type conversion. The quantum efficiency of the heterojunction device can reach to 0.13 at 1.1 mum.
Keywords :
annealing; antimony compounds; gallium arsenide; gallium compounds; photodetectors; semiconductor epitaxial layers; semiconductor heterojunctions; silicon; GaAsSbN:Si-GaAs; acceptor concentration; cut-off wavelength; epilayer; heterojunction detector; homojunction p-i-n detector; long wavelength PIN detectors; quantum efficiency; thermal annealing; wavelength 1.1 mum; Annealing; Detectors; Gallium arsenide; Heterojunctions; Lattices; Molecular beam epitaxial growth; Nitrogen; Photovoltaic cells; Plasma temperature; Substrates; GaAsSbN; dilute nitrides; photodetctor;
Conference_Titel :
Indium Phosphide and Related Materials, 2008. IPRM 2008. 20th International Conference on
Conference_Location :
Versailles
Print_ISBN :
978-1-4244-2258-6
Electronic_ISBN :
1092-8669
DOI :
10.1109/ICIPRM.2008.4703012