DocumentCode :
1815172
Title :
Evaluation of modeling, simulation and optimization approaches for work flow management in semiconductor manufacturing
Author :
Kohn, Robert ; Noack, Daniel ; Mosinski, Marcin ; Zhou, Zhugen ; Rose, Oliver
Author_Institution :
Inst. of Appl. Comput. Sci., Dresden Univ. of Technol., Dresden, Germany
fYear :
2009
fDate :
13-16 Dec. 2009
Firstpage :
1592
Lastpage :
1600
Abstract :
Work flow management is one of the key elements that bias the economic competitive position of a fabrication facility, especially in semiconductor manufacturing. This paper presents the goals, methods and challenges of our collaborative project with partners in semiconductor industry. The project activities concern topics in the disciplines of modeling, simulation and optimization classed among work flow management. Our goal is to evaluate suitable methods in the area of modeling, simulation and optimization in use cases given by reality. This project considers future performance prediction using different simulation techniques. In addition several optimization approaches will be evaluated in this project.
Keywords :
production facilities; project management; semiconductor industry; economic competitive position; fabrication facility; project management; semiconductor industry; semiconductor manufacturing; work flow management; Computational complexity; Computational modeling; Discrete event simulation; Fabrication; Optimization methods; Semiconductor device manufacture; Semiconductor device modeling; Technology management; Usability; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference (WSC), Proceedings of the 2009 Winter
Conference_Location :
Austin, TX
Print_ISBN :
978-1-4244-5770-0
Type :
conf
DOI :
10.1109/WSC.2009.5429266
Filename :
5429266
Link To Document :
بازگشت